Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984319 | Substrate processing method and film forming system | Kensaku Narushima, Takanobu HOTTA, Atsushi Matsumoto, Masato Araki, Hideaki Yamasaki | 2024-05-14 |
| 11753719 | Flow rate control method, flow rate control device, and film forming apparatus | Kennan Mo, Kouichi SEKIDO, Takanobu HOTTA, Atsushi Matsumoto, Kensaku Narushima | 2023-09-12 |
| 11629404 | Method of forming tungsten film and controller | Kensaku Narushima, Atsushi Matsumoto, Takanobu HOTTA | 2023-04-18 |
| 11069512 | Film forming apparatus and gas injection member used therefor | Shinya Okabe, Takashi Mochizuki, Hideaki Yamasaki, Kazuki DEMPOH | 2021-07-20 |
| 10910225 | Film forming method | Kensaku Narushima, Atsushi Matsumoto, Takanobu HOTTA | 2021-02-02 |
| 10319585 | Film forming method | Kohichi Satoh, Shinya Okabe, Motoko NAKAGOMI, Yuji Kobayashi | 2019-06-11 |