Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11753719 | Flow rate control method, flow rate control device, and film forming apparatus | Kouichi SEKIDO, Takanobu HOTTA, Nagayasu Hiramatsu, Atsushi Matsumoto, Kensaku Narushima | 2023-09-12 |
| 11236425 | Method of processing substrate | Nuri CHOI, Kouichi SEKIDO, Katsumasa Yamaguchi, Eiichi KOMORI | 2022-02-01 |