Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11873556 | Raw material supply apparatus and film forming apparatus | Tomohisa KIMOTO, Noriyuki Watanabe, Kensaku Narushima, Takuya KAWAGUCHI | 2024-01-16 |
| 11753719 | Flow rate control method, flow rate control device, and film forming apparatus | Kennan Mo, Takanobu HOTTA, Nagayasu Hiramatsu, Atsushi Matsumoto, Kensaku Narushima | 2023-09-12 |
| 11236425 | Method of processing substrate | Kennan Mo, Nuri CHOI, Katsumasa Yamaguchi, Eiichi KOMORI | 2022-02-01 |
| 10870919 | Gas supply method and film forming method | Katsumasa Yamaguchi, Kensaku Narushima, Hironori Yagi | 2020-12-22 |