Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155923 | Gas supply device, gas supply method and film forming method | Katsumasa Yamaguchi, Kensaku Narushima | 2021-10-26 |
| 10870919 | Gas supply method and film forming method | Katsumasa Yamaguchi, Kensaku Narushima, Kouichi SEKIDO | 2020-12-22 |
| 10612143 | Raw material gas supply apparatus and film forming apparatus | Eiichi KOMORI | 2020-04-07 |
| 10385457 | Raw material gas supply apparatus, raw material gas supply method and storage medium | Masayuki Moroi | 2019-08-20 |
| 10256101 | Raw material gas supply apparatus, raw material gas supply method and storage medium | Kensaku Narushima, Atsunari Matsuyama | 2019-04-09 |
| 10036090 | Trap mechanism, exhaust system, and film formation device | Eiichi KOMORI | 2018-07-31 |
| 7245487 | Cooling system, electronic equipment, and external unit | Yasuhiro Ootori | 2007-07-17 |
| 7113061 | Tuner unit having a tuner board within the height limit of a tuner signal connector | Yasuhiro Ootori, Kenichi Nagase, Mitsuyuki Tokusashi, Tomonori Hasegawa | 2006-09-26 |
| 7029301 | Connection device, connector unit, connectors, and electronic equipment | Yasuhiro Ootori, Kenichi Nagase, Mitsuyuki Tokusashi, Tomonori Hasegawa | 2006-04-18 |
| 6473993 | Thermal treatment method and apparatus | Yasushi Yagi, Takeshi Sakuma, Wataru Okase, Masayuki Kitamura, Eisuke Morisaki | 2002-11-05 |
| 6121579 | Heating apparatus, and processing apparatus | Kazutsugu Aoki, Wataru Okase, Masamichi Nomura | 2000-09-19 |
| 5938850 | Single wafer heat treatment apparatus | Junichi Arami, Kazutsugu Aoki | 1999-08-17 |
| 5591269 | Vacuum processing apparatus | Junichi Arami, Kenji Ishikawa, Youichi Deguchi, Nobuo Kawada, Isao Yanagisawa | 1997-01-07 |