Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665166 | Plasma processing apparatus | Satoru Kawakami, Yoichi Ueda, Mitsuaki Komino | 1997-09-09 |
| 5591269 | Vacuum processing apparatus | Junichi Arami, Kenji Ishikawa, Hironori Yagi, Nobuo Kawada, Isao Yanagisawa | 1997-01-07 |
| 5478429 | Plasma process apparatus | Mitsuaki Komino, Yoichi Ueda, Satoru Kawakami | 1995-12-26 |