Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7169283 | Anodization device and anodization method | Yasushi Yagi, Mitsuru Ushijima | 2007-01-30 |
| 7118663 | Anodic oxidizer, anodic oxidation method | Yasushi Yagi, Mitsuru Ushijima | 2006-10-10 |
| 6121579 | Heating apparatus, and processing apparatus | Wataru Okase, Hironori Yagi, Masamichi Nomura | 2000-09-19 |
| 6111225 | Wafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressures | Wataru Ohkase, Masaaki Hasei | 2000-08-29 |
| 5938850 | Single wafer heat treatment apparatus | Junichi Arami, Hironori Yagi | 1999-08-17 |
| 5352902 | Method for controlling plasma surface-treatments with a plurality of photodetectors and optical filters | — | 1994-10-04 |
| 4954684 | Vertical type heat-treating apparatus and heat-treating method | Noboru Fuse, Yoshio Sakamoto | 1990-09-04 |