Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5217501 | Vertical wafer heat treatment apparatus having dual load lock chambers | Hirofumi Kitayama, Hisashi Hattori | 1993-06-08 |
| 4989540 | Apparatus for reaction treatment | Hirofumi Kitayama | 1991-02-05 |
| 4954684 | Vertical type heat-treating apparatus and heat-treating method | Kazutsugu Aoki, Yoshio Sakamoto | 1990-09-04 |
| 4284998 | Junction type field effect transistor with source at oxide-gate interface depth to maximize .mu. | Kenichi Muramoto, Keizo Tani, Masaaki Iwanishi | 1981-08-18 |