Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6111225 | Wafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressures | Kazutsugu Aoki, Masaaki Hasei | 2000-08-29 |
| 5763856 | Heat treatment apparatus and method | — | 1998-06-09 |
| 5616264 | Method and apparatus for controlling temperature in rapid heat treatment system | Katsuo Nishi, Kazuo Terada, Kenichi Yamaga | 1997-04-01 |
| 5536918 | Heat treatment apparatus utilizing flat heating elements for treating semiconductor wafers | Yasushi Yagi, Satoshi Kawachi | 1996-07-16 |
| 5520742 | Thermal processing apparatus with heat shielding member | — | 1996-05-28 |
| 5443648 | Vertical heat treatment apparatus with a rotary holder turning independently of a liner plate | — | 1995-08-22 |
| 5393349 | Semiconductor wafer processing apparatus | — | 1995-02-28 |
| D327078 | Instrument for transferring boats for thermal treatment of semiconductor wafers | Ken Nakao, Seishiro Sato | 1992-06-16 |
| D326273 | Heat insulating cylinder for thermal treatment of semiconductor wafers | Ken Nakao, Seishiro Sato | 1992-05-19 |
| D326272 | Heat insulating cylinder for thermal treatment of semiconductor wafers | Ken Nakao | 1992-05-19 |
| 5007788 | Pitch changing device for changing pitches of plate-like objects and method of changing pitches | Takanobu Asano, Kenichi Yamaga | 1991-04-16 |
| 4955775 | Semiconductor wafer treating apparatus | Seishiro Sato | 1990-09-11 |
| 4952115 | Wafer support device | — | 1990-08-28 |
| 4950870 | Heat-treating apparatus | Hiroyuki Mitsuhashi, Seishiro Sato | 1990-08-21 |
| 4943235 | Heat-treating apparatus | Ken Nakao, Seishiro Sato | 1990-07-24 |
| 4938691 | Heat-treating apparatus | Ken Nakao, Seishiro Sato | 1990-07-03 |