Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399922 | Single-substrate-heat-treating apparatus for semiconductor process system | Wataru Okase | 2002-06-04 |
| 6228173 | Single-substrate-heat-treating apparatus for semiconductor process system | Wataru Okase | 2001-05-08 |
| 6224934 | Ozone-processing apparatus for semiconductor process system | Kenji Ishikawa, Qian Shao Shou, Tetsuya Nakano | 2001-05-01 |
| 6111225 | Wafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressures | Wataru Ohkase, Kazutsugu Aoki | 2000-08-29 |
| 5554226 | Heat treatment processing apparatus and cleaning method thereof | Wataru Okase | 1996-09-10 |
| 5427625 | Method for cleaning heat treatment processing apparatus | Wataru Okase | 1995-06-27 |