QS

Qian Shao Shou

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,580,403 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6224934 Ozone-processing apparatus for semiconductor process system Masaaki Hasei, Kenji Ishikawa, Tetsuya Nakano 2001-05-01