Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8387559 | Semiconductor manufacturing plant | Jiro Hiraiwa, Osamu Yoshimoto, Hiroshi Hayakawa, Tetsuro Tojo, Tsuneyuki Okabe +3 more | 2013-03-05 |
| 7207123 | Dry air-supplying apparatus and treating apparatus | Takashi Tanahashi, Ken Nakao, Katsuhiro Yamashita | 2007-04-24 |
| 6863732 | Heat treatment system and method | Katsutoshi Ishii, Hiroyuki Yamamoto, George Hoshi, Kazutoshi Miura | 2005-03-08 |
| 6540509 | Heat treatment system and method | Katsutoshi Ishii, Hiroyuki Yamamoto, George Hoshi, Kazutoshi Miura | 2003-04-01 |
| 5829939 | Treatment apparatus | Hiroyuki Iwai, Tamotsu Tanifuji, Ryoichi Okura | 1998-11-03 |
| 5562383 | Treatment apparatus | Hiroyuki Iwai, Tamotsu Tanifuji, Ryoichi Okura | 1996-10-08 |
| 5533243 | Notch position aligning apparatus and process for using the apparatus to independently align individual wafers in a wafer cassette | — | 1996-07-09 |
| 5423503 | Plate-like member conveying apparatus | Susumu Tanaka, Hisashi Kikuchi, Noboru Sato | 1995-06-13 |
| 5261935 | Clean air apparatus | Katsumi Ishii, Masaharu Abe, Kenichi Yamaga, Kazunari Sakata, Takashi Tanahashi +1 more | 1993-11-16 |
| 5236181 | Vertical heat treating apparatus | Katsumi Ishii, Masaharu Abe | 1993-08-17 |
| 5183378 | Wafer counter having device for aligning wafers | Katsumi Ishii | 1993-02-02 |
| 5131799 | Semiconductor wafer transferring apparatus and boat for thermal treatment of a semiconductor wafer | Hironobu Nishi, Kenichi Yamaga | 1992-07-21 |
| 5125784 | Wafers transfer device | — | 1992-06-30 |
| 5110248 | Vertical heat-treatment apparatus having a wafer transfer mechanism | Hirofumi Kitayama, Hiroyuki Iwai, Yuuji Ono | 1992-05-05 |
| 5055036 | Method of loading and unloading wafer boat | Hiroyuki Iwai, Yuji Ono | 1991-10-08 |
| 5030057 | Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer | Hironobu Nishi, Kenichi Yamaga, Kazutoshi Sawado, Masashi FUMOTO, Shozo Ito +1 more | 1991-07-09 |
| 5007788 | Pitch changing device for changing pitches of plate-like objects and method of changing pitches | Kenichi Yamaga, Wataru Ohkase | 1991-04-16 |
| 4938655 | Wafer transfer method | — | 1990-07-03 |