Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679878 | Substrate processing apparatus | — | 2020-06-09 |
| 7819658 | Heat treatment system and method therefore | Shinya Mochizuki, Motoki Akimoto, Hiroshi Motono | 2010-10-26 |
| 7059849 | Heat treatment system and a method for cooling a loading chamber | Koyu Hasegawa, Keiichi Katabuchi, Shingo Watanabe, Shinya Mochizuki, Motoki Akimoto +1 more | 2006-06-13 |
| 6729823 | Processing system for object to be processed | Yasushi Takeuchi | 2004-05-04 |
| 6419482 | Opening and closing apparatus of an opening and closing lid of a box accommodating an object to be processed and a processing system of an object to be processed | Tamotsu Tanifuji, Masahiro Ogawa | 2002-07-16 |
| 6042372 | Heat treatment apparatus | Tamotsu Tanifuji, Akihiko Tsukada | 2000-03-28 |
| 5951282 | Vertical heat treatment apparatus | Tamotsu Tanifuji, Akihiko Tsukada | 1999-09-14 |
| 5556275 | Heat treatment apparatus | Kenji Tago, Mitsuo Mizukami | 1996-09-17 |
| 5447294 | Vertical type heat treatment system | Masato KADOBE, Isao Furuya, Shingo Watanabe, Hiroki Fukushima, Hiroyuki Iwai | 1995-09-05 |
| 5261935 | Clean air apparatus | Katsumi Ishii, Takanobu Asano, Masaharu Abe, Kenichi Yamaga, Takashi Tanahashi +1 more | 1993-11-16 |
| 5261167 | Vertical heat treating apparatus | — | 1993-11-16 |
| 5226812 | Vertical type heat-treating apparatus | — | 1993-07-13 |
| 5219464 | Clean air apparatus | Kenichi Yamaga, Katsumi Ishii, Takashi Tanahashi, Syuji Moriya | 1993-06-15 |
| 5207578 | Heat processing apparatus of vertical type | — | 1993-05-04 |
| 5181819 | Apparatus for processing semiconductors | Katsumi Ishii, Kenichi Yamaga | 1993-01-26 |