AT

Akihiko Tsukada

TL Tokyo Electron Limited: 4 patents #1,723 of 5,567Top 35%
Overall (All Time): #1,251,225 of 4,157,543Top 35%
4
Patents All Time

Issued Patents All Time

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
7367350 Processing device and method of maintaining the device Daisuke Toriya, Kenji Homma, Kouji Shimomura 2008-05-06
6319327 MOCVD system Akihiko Hiroe, Kouji Shimomura 2001-11-20
6042372 Heat treatment apparatus Kazunari Sakata, Tamotsu Tanifuji 2000-03-28
5951282 Vertical heat treatment apparatus Kazunari Sakata, Tamotsu Tanifuji 1999-09-14