Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8827254 | Substrate transfer processing apparatus | Yuya Inoue, Hisato Tanaka, Makoto Takahashi, Kuniyoshi Sekine | 2014-09-09 |
| 8783674 | Stage | Yuya Inoue, Hisato Tanaka, Makoto Takahashi, Kuniyoshi Sekine | 2014-07-22 |
| 8485507 | Movable table and processing stage | Yuya Inoue, Hisato Tanaka | 2013-07-16 |
| 6419482 | Opening and closing apparatus of an opening and closing lid of a box accommodating an object to be processed and a processing system of an object to be processed | Kazunari Sakata, Masahiro Ogawa | 2002-07-16 |
| 6042372 | Heat treatment apparatus | Kazunari Sakata, Akihiko Tsukada | 2000-03-28 |
| 5951282 | Vertical heat treatment apparatus | Kazunari Sakata, Akihiko Tsukada | 1999-09-14 |
| 5829939 | Treatment apparatus | Hiroyuki Iwai, Takanobu Asano, Ryoichi Okura | 1998-11-03 |
| 5562383 | Treatment apparatus | Hiroyuki Iwai, Takanobu Asano, Ryoichi Okura | 1996-10-08 |