Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8827254 | Substrate transfer processing apparatus | Yuya Inoue, Tamotsu Tanifuji, Makoto Takahashi, Kuniyoshi Sekine | 2014-09-09 |
| 8783674 | Stage | Yuya Inoue, Tamotsu Tanifuji, Makoto Takahashi, Kuniyoshi Sekine | 2014-07-22 |
| 8485507 | Movable table and processing stage | Yuya Inoue, Tamotsu Tanifuji | 2013-07-16 |
| 7779807 | Intake/exhaust valve and its seal for internal combustion engine | Tsuneo Endoh, Yasuhisa Tateoka, Hiroaki Hara | 2010-08-24 |
| 7555406 | Method of maintaining and automatically inspecting processing apparatus | Akira Obi, Akira Iwami, Kazushi Tahara, Shigeaki Kato | 2009-06-30 |
| 7386423 | Methods of self-diagnosing software for driving processing apparatus | Akira Obi, Akira Iwami, Kazushi Tahara, Shigeaki Kato | 2008-06-10 |
| 6954716 | Method of automatically resetting processing apparatus | Akira Obi, Akira Iwami, Kazushi Tahara, Shigeaki Kato | 2005-10-11 |
| 5306921 | Ion implantation system using optimum magnetic field for concentrating ions | Naoki Takayama | 1994-04-26 |
| 5296713 | Ion source device | — | 1994-03-22 |