Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8175736 | Method and system for performing a chemical oxide removal process | Masayuki Tomoyasu, Merritt Funk, Kevin Pinto, Masaya Odagiri, Lemuel Chen +2 more | 2012-05-08 |
| 7877161 | Method and system for performing a chemical oxide removal process | Masayuki Tomoyasu, Merritt Funk, Kevin Pinto, Masaya Odagiri, Lemuel Chen +2 more | 2011-01-25 |
| 7555406 | Method of maintaining and automatically inspecting processing apparatus | Hisato Tanaka, Akira Obi, Kazushi Tahara, Shigeaki Kato | 2009-06-30 |
| 7386423 | Methods of self-diagnosing software for driving processing apparatus | Hisato Tanaka, Akira Obi, Kazushi Tahara, Shigeaki Kato | 2008-06-10 |
| 6954716 | Method of automatically resetting processing apparatus | Hisato Tanaka, Akira Obi, Kazushi Tahara, Shigeaki Kato | 2005-10-11 |