Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837496 | Substrate processing apparatus and method of processing a substrate | Jong-Woo Sun, Sung Moon Park, Je-Woo Han, Kwang-Nam Kim, Ho Chang Lee +1 more | 2023-12-05 |
| 11817298 | Focus ring, chuck assembly for securing a substrate and plasma treatment apparatus having the same | Incheol Song, Hongmin Yoon, Jihyun Lim | 2023-11-14 |
| 11450545 | Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the same | Jongwoo Sun, Incheol Song, Hongmin Yoon, Jihyun Lim, Jewoo Han | 2022-09-20 |
| 11018046 | Substrate processing apparatus including edge ring | Jong-Woo Sun, Sung Moon Park, Je-Woo Han, Kwang-Nam Kim, Ho Chang Lee +1 more | 2021-05-25 |
| 9859175 | Substrate processing system, method of managing the same and method of manufacturing semiconductor device with the same | Kiwook Song, Bum-Soo Kim, Kye Hyun Baek, Eunwoo Lee, Jong-Seo Hong | 2018-01-02 |
| 9799561 | Method for fabricating a semiconductor device | Chan Hoon Park, Dong Chan Kim, Je-Woo Han | 2017-10-24 |
| 8175736 | Method and system for performing a chemical oxide removal process | Merritt Funk, Kevin Pinto, Masaya Odagiri, Lemuel Chen, Asao Yamashita +2 more | 2012-05-08 |
| 7877161 | Method and system for performing a chemical oxide removal process | Merritt Funk, Kevin Pinto, Masaya Odagiri, Lemuel Chen, Asao Yamashita +2 more | 2011-01-25 |
| 7648610 | Baffle plate, apparatus for producing the same, method of producing the same, and gas processing apparatus containing baffle plate | Taro Komiya, Hatsuo Osada, Shigetoshi Hosaka, Tomihiro Yonenaga | 2010-01-19 |
| 7505879 | Method for generating multivariate analysis model expression for processing apparatus, method for executing multivariate analysis of processing apparatus, control device of processing apparatus and control system for processing apparatus | Hin Oh, Hideki Tanaka | 2009-03-17 |
| 7477960 | Fault detection and classification (FDC) using a run-to-run controller | James E. Willis, Merritt Funk, Kevin Lally, Kevin Pinto, Raymond Peterson +1 more | 2009-01-13 |
| 7289866 | Plasma processing method and apparatus | — | 2007-10-30 |
| 7172675 | Observation window of plasma processing apparatus and plasma processing apparatus using the same | — | 2007-02-06 |
| 7153387 | Plasma processing apparatus and method of plasma processing | — | 2006-12-26 |
| 7047095 | Process control system and process control method | — | 2006-05-16 |
| 6544380 | Plasma treatment method and apparatus | Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Yukio Naito +6 more | 2003-04-08 |
| 6423242 | Etching method | Masayuki Kojima, Yoshifumi Tahara, Akira Koshiishi | 2002-07-23 |
| 6264788 | Plasma treatment method and apparatus | Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Yukio Naito +6 more | 2001-07-24 |
| 6106737 | Plasma treatment method utilizing an amplitude-modulated high frequency power | Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Yukio Naito +6 more | 2000-08-22 |
| 6074518 | Plasma processing apparatus | Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Hiroshi Tsuchiya, Yukio Naito +6 more | 2000-06-13 |
| 5904780 | Plasma processing apparatus | — | 1999-05-18 |
| 5900103 | Plasma treatment method and apparatus | Akira Koshiishi | 1999-05-04 |
| 5888907 | Plasma processing method | Shinji Himori | 1999-03-30 |
| 5343047 | Ion implantation system | Hiroo Ono, Shuji Kikuchi, Naoki Takayama, Riki Tomoyoshi | 1994-08-30 |
| 5067798 | Laser beam scanning system | — | 1991-11-26 |