Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7801635 | Real-time parameter tuning for etch processes | Merritt Funk, Sachin G. Deshpande | 2010-09-21 |
| 7642102 | Real-time parameter tuning using wafer thickness | Merritt Funk, Sachin G. Deshpande | 2010-01-05 |
| 7623978 | Damage assessment of a wafer using optical metrology | Merritt Funk, Radha Sundararajan | 2009-11-24 |
| 7619731 | Measuring a damaged structure formed on a wafer using optical metrology | Merritt Funk, Radha Sundararajan | 2009-11-17 |
| 7576851 | Creating a library for measuring a damaged structure formed on a wafer using optical metrology | Merritt Funk, Radha Sundararajan | 2009-08-18 |
| 7571074 | Method of using a wafer-thickness-dependant profile library | Merritt Funk, Sachin G. Deshpande | 2009-08-04 |
| 7502660 | Feature dimension deviation correction system, method and program product | David V. Horak, Wesley C. Natzle, Merritt Funk, Daniel Prager | 2009-03-10 |
| 7477960 | Fault detection and classification (FDC) using a run-to-run controller | James E. Willis, Merritt Funk, Kevin Pinto, Masayuki Tomoyasu, Raymond Peterson +1 more | 2009-01-13 |
| 7324193 | Measuring a damaged structure formed on a wafer using optical metrology | Merritt Funk, Radha Sundararajan | 2008-01-29 |
| 7289864 | Feature dimension deviation correction system, method and program product | David V. Horak, Wesley C. Natzle, Merritt Funk, Daniel Prager | 2007-10-30 |