Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10375812 | Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Merritt Funk | 2019-08-06 |
| 10354841 | Plasma generation and control using a DC ring | Jianping Zhao, Lee Chen, Barton Lane, Merritt Funk | 2019-07-16 |
| 9431218 | Scalable and uniformity controllable diffusion plasma source | Jianping Zhao, Lee Chen, Merritt Funk | 2016-08-30 |
| 9396900 | Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties | Barton Lane, Lee Chen, Peter L. G. Ventzek, Merritt Funk, Jianping Zhao | 2016-07-19 |
| 9301383 | Low electron temperature, edge-density enhanced, surface wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Merritt Funk | 2016-03-29 |
| 9087677 | Methods of electrical signaling in an ion energy analyzer | Merritt Funk, Lee Chen, Barton Lane, Jianping Zhao | 2015-07-21 |
| 8968588 | Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Vincent M. Donnelly, Demetre J. Economou, Merritt Funk | 2015-03-03 |
| 8847159 | Ion energy analyzer | Lee Chen, Barton Lane, Merritt Funk, Jianping Zhao | 2014-09-30 |
| 8816281 | Ion energy analyzer and methods of manufacturing the same | Merritt Funk, Lee Chen, Barton Lane, Jianping Zhao | 2014-08-26 |
| 8721833 | Variable capacitance chamber component incorporating ferroelectric materials and methods of manufacturing and using thereof | Zhiying Chen, Jianping Zhao, Lee Chen, Merritt Funk | 2014-05-13 |
| 8501499 | Adaptive recipe selector | Merritt Funk, Lee Chen, Barton Lane | 2013-08-06 |
| 8486798 | Variable capacitance chamber component incorporating a semiconductor junction and methods of manufacturing and using thereof | Zhiying Chen, Jianping Zhao, Lee Chen, Merritt Funk | 2013-07-16 |
| 8343371 | Apparatus and method for improving photoresist properties using a quasi-neutral beam | Merritt Funk, Lee Chen | 2013-01-01 |
| 8183062 | Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences | Merritt Funk, Asao Yamashita, Daniel Prager | 2012-05-22 |
| 8019458 | Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures | Merritt Funk, Asao Yamashita, Daniel Prager, Hyung Joo Lee | 2011-09-13 |
| 7988813 | Dynamic control of process chemistry for improved within-substrate process uniformity | Lee Chen, Merritt Funk | 2011-08-02 |
| 7967995 | Multi-layer/multi-input/multi-output (MLMIMO) models and method for using | Merritt Funk, Hyung Joo Lee, Daniel Prager, Asao Yamashita | 2011-06-28 |
| 7939450 | Method and apparatus for spacer-optimization (S-O) | Asao Yamashita, Merritt Funk, Daniel Prager, Lee Chen | 2011-05-10 |
| 7899637 | Method and apparatus for creating a gate optimization evaluation library | Asao Yamashita, Merritt Funk, Daniel Prager, Lee Chen | 2011-03-01 |
| 7894927 | Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures | Merritt Funk, Asao Yamashita, Daniel Prager, Hyung Joo Lee | 2011-02-22 |
| 7713758 | Method and apparatus for optimizing a gate channel | Asao Yamashita, Merritt Funk, Daniel Prager, Lee Chen | 2010-05-11 |
| 7674636 | Dynamic temperature backside gas control for improved within-substrate process uniformity | Lee Chen, Merritt Funk | 2010-03-09 |
| 7623978 | Damage assessment of a wafer using optical metrology | Kevin Lally, Merritt Funk | 2009-11-24 |
| 7619731 | Measuring a damaged structure formed on a wafer using optical metrology | Kevin Lally, Merritt Funk | 2009-11-17 |
| 7576851 | Creating a library for measuring a damaged structure formed on a wafer using optical metrology | Kevin Lally, Merritt Funk | 2009-08-18 |