Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515782 | Atomic layer etching with pulsed plasmas | Vincent M. Donnelly | 2019-12-24 |
| 10207469 | Systems and methods for rapidly fabricating nanopatterns in a parallel fashion over large areas | Vincent M. Donnelly, Siyuan Tian | 2019-02-19 |
| 9852893 | Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus | Lee Chen, Jianping Zhao, Merritt Funk | 2017-12-26 |
| 8968588 | Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Vincent M. Donnelly, Merritt Funk, Radha Sundararajan | 2015-03-03 |
| 8030620 | System and method for nano-pantography | Vincent M. Donnelly, Paul Ruchhoeft, Lin Xu, Sri Charan Vemula, Manish Jain | 2011-10-04 |
| 7883839 | Method and apparatus for nano-pantography | Vincent M. Donnelly, Paul Ruchhoeft, Lin Xu, Sri Charan Vemula, Manish Jain | 2011-02-08 |
| 7638759 | Hyperthermal neutral beam source and method of operating | Lee Chen, Vincent M. Donnelly | 2009-12-29 |
| 7358484 | Hyperthermal neutral beam source and method of operating | Lee Chen, Vincent M. Donnelly | 2008-04-15 |
| 4859277 | Method for measuring plasma properties in semiconductor processing | Gabriel G. Barna | 1989-08-22 |