Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308265 | RF immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing system | Yuma Ohkura, Changyou Jing, Matthew CLAUSSEN | 2025-05-20 |
| 12154814 | Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array | — | 2024-11-26 |
| 12077862 | Connector for substrate support with embedded temperature sensors | Donald J. Miller | 2024-09-03 |
| 11869794 | Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array | — | 2024-01-09 |
| 11791189 | Reflectometer to monitor substrate movement | Eric A. Pape, Dmitry Opaits, Jorge Luque, Jeffrey D. Bonde | 2023-10-17 |
| 11430688 | Two-stage pin lifter for de-chuck operations | Eric A. Pape | 2022-08-30 |
| 11323007 | Magnetic levitation bearing, magnetic levitation rotor support assembly, and compressor | Xiaobo ZHANG, Gao Gong, Yusheng Hu, Jianning Liu, Fang Zhang +3 more | 2022-05-03 |
| 11174898 | Wiring structure of magnetic suspension bearing, compressor and air conditioner | Xin Li, Yusheng Hu, Xiaobo ZHANG, Jianning Liu, Fang Zhang +4 more | 2021-11-16 |
| 10957520 | Long-life high-power terminals for substrate support with embedded heating elements | — | 2021-03-23 |
| 10851458 | Connector for substrate support with embedded temperature sensors | Donald J. Miller | 2020-12-01 |
| 10851835 | Stator assembly of a magnetic suspension bearing and manufacturing method | Fang Zhang, Jianning Liu, Jinxin Jia, Xiaobo ZHANG, Chengbao Zhong +3 more | 2020-12-01 |
| 10767692 | Magnetic levitation bearing assembly and compressor | Gao Gong, Yusheng Hu, Xiaobo ZHANG, Jianning Liu, Fang Zhang +4 more | 2020-09-08 |
| 10746223 | Protective structure for magnetic bearing and magnetic bearing assembly | Fang Zhang, Yusheng Hu, Xiaobo ZHANG, Jianning Liu, Gao Gong +5 more | 2020-08-18 |
| 10690184 | Axial magnetic bearing having a protective device | Fang Zhang, Yusheng Hu, Xiaobo ZHANG, Jianning Liu, Gao Gong +5 more | 2020-06-23 |
| 10522377 | System and method for substrate support feed-forward temperature control based on RF power | Tao Zhang, Eric A. Pape, Jorge Jose Zaninovich | 2019-12-31 |
| 10207469 | Systems and methods for rapidly fabricating nanopatterns in a parallel fashion over large areas | Vincent M. Donnelly, Demetre J. Economou | 2019-02-19 |