Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308265 | RF immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing system | Siyuan Tian, Yuma Ohkura, Changyou Jing | 2025-05-20 |