Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308265 | RF immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing system | Siyuan Tian, Changyou Jing, Matthew CLAUSSEN | 2025-05-20 |
| 10764966 | Laminated heater with different heater trace materials | Darrell Ehrlich, Eric A. Pape | 2020-09-01 |
| 10667379 | Connections between laminated heater and heater voltage inputs | Darrell Ehrlich, Eric A. Pape | 2020-05-26 |