Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381105 | Coolant channel with internal fins for substrate processing pedestals | Feng Wang, Alexander Matyushkin, Eric SAMULON | 2025-08-05 |
| 12340989 | Electrostatic edge ring mounting system for substrate processing | Alexander Matyushkin, Keith Comendant, Adam Mace, John Holland, Felix Kozakevich +1 more | 2025-06-24 |
| 12131890 | Chuck for plasma processing chamber | Ann Erickson | 2024-10-29 |
| 11967517 | Electrostatic chuck with ceramic monolithic body | Feng Wang, Keith Gaff, Christopher Kimball | 2024-04-23 |
| 11798789 | Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features | Alejandro SANCHEZ, Grayson Ford, Aravind Alwan, Kevin Ka Kei Leung, Anthony Contreras +3 more | 2023-10-24 |
| 11594400 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more | 2023-02-28 |
| 10978323 | Substrate holder having integrated temperature measurement electrical devices | Eric A. Pape, Mike Jing | 2021-04-13 |
| 10764966 | Laminated heater with different heater trace materials | Yuma Ohkura, Eric A. Pape | 2020-09-01 |
| 10667379 | Connections between laminated heater and heater voltage inputs | Yuma Ohkura, Eric A. Pape | 2020-05-26 |
| 10622195 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more | 2020-04-14 |
| 10332729 | Compression member for use in showerhead electrode assembly | Daniel Arthur Brown, Ian Kenworthy | 2019-06-25 |
| 10186437 | Substrate holder having integrated temperature measurement electrical devices | Eric A. Pape, Mike Jing | 2019-01-22 |
| 9922804 | Compression member for use in showerhead electrode assembly | Daniel Arthur Brown, Ian Kenworthy | 2018-03-20 |
| 9058960 | Compression member for use in showerhead electrode assembly | Daniel Arthur Brown, Ian Kenworthy | 2015-06-16 |