Darrell Ehrlich — 15 Patents at Lam Research

Darrell Ehrlich has been granted 15 US patents while listed as an inventor at Lam Research. The first was granted in 2015 and the most recent in December 2025. Darrell Ehrlich ranks #307,048 of 4,157,543 US inventors in our database (top 7.4%). Patent records list Darrell Ehrlich in San Jose, CA, US.

Issued Patents All Time

Showing 1–15 of 15 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
12500068	Edge rings providing kinematic coupling and corresponding substrate processing systems	Albert L. Sanchez, Grayson Ford, Aravind Alwan, Kevin Ka Kei Leung, Anthony Contreras +3 more	2025-12-16
12381105	Coolant channel with internal fins for substrate processing pedestals	Feng Wang, Alexander Matyushkin, Eric SAMULON	2025-08-05
12340989	Electrostatic edge ring mounting system for substrate processing	Alexander Matyushkin, Keith Comendant, Adam Mace, John Holland, Felix Kozakevich +1 more	2025-06-24
12131890	Chuck for plasma processing chamber	Ann Erickson	2024-10-29	$201,698,000
11967517	Electrostatic chuck with ceramic monolithic body	Feng Wang, Keith Gaff, Christopher Kimball	2024-04-23	$407,659,000
11798789	Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features	Alejandro SANCHEZ, Grayson Ford, Aravind Alwan, Kevin Ka Kei Leung, Anthony Contreras +3 more	2023-10-24	$152,530,000
11594400	Multi zone gas injection upper electrode system	Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more	2023-02-28	$186,503,000
10978323	Substrate holder having integrated temperature measurement electrical devices	Eric A. Pape, Mike Jing	2021-04-13	$221,486,000
10764966	Laminated heater with different heater trace materials	Yuma Ohkura, Eric A. Pape	2020-09-01	$45,225,000
10667379	Connections between laminated heater and heater voltage inputs	Yuma Ohkura, Eric A. Pape	2020-05-26	$51,788,000
10622195	Multi zone gas injection upper electrode system	Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more	2020-04-14	$56,328,000
10332729	Compression member for use in showerhead electrode assembly	Daniel Arthur Brown, Ian Kenworthy	2019-06-25	$42,745,000
10186437	Substrate holder having integrated temperature measurement electrical devices	Eric A. Pape, Mike Jing	2019-01-22	$50,002,000
9922804	Compression member for use in showerhead electrode assembly	Daniel Arthur Brown, Ian Kenworthy	2018-03-20	$48,965,000
9058960	Compression member for use in showerhead electrode assembly	Daniel Arthur Brown, Ian Kenworthy	2015-06-16	$14,033,000

Darrell Ehrlich — 15 Patents

Issued Patents All Time

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