Issued Patents All Time
Showing 25 most recent of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368025 | Edge seal for lower electrode assembly | David Schaefer, Ambarish Chhatre, Sung Je Kim, Brooke Mesler Lai | 2025-07-22 |
| 12227840 | Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating | Devin Ramdutt, Ann Erickson | 2025-02-18 |
| 11967517 | Electrostatic chuck with ceramic monolithic body | Feng Wang, Christopher Kimball, Darrell Ehrlich | 2024-04-23 |
| 11935776 | Electrostatically clamped edge ring | Christopher Kimball, Feng Wang | 2024-03-19 |
| 11848177 | Multi-plate electrostatic chucks with ceramic baseplates | Feng Wang, Christopher Kimball | 2023-12-19 |
| 11781650 | Edge seal for lower electrode assembly | David Schaefer, Ambarish Chhatre, Sung Je Kim, Brooke Mesler Lai | 2023-10-10 |
| 11651991 | Electrostatic Chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, John Holland, Felix Kozakevich | 2023-05-16 |
| 11069553 | Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity | Alexander Matyushkin, John Holland, Harmeet Singh, Alexei Marakhtanov, Zhigang Chen +1 more | 2021-07-20 |
| 11024532 | Electrostatic chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, John Holland, Felix Kozakevich | 2021-06-01 |
| 10923380 | Electrostatically clamped edge ring | Christopher Kimball, Feng Wang | 2021-02-16 |
| 10892197 | Edge seal configurations for a lower electrode assembly | Matthew Busche, Anthony J. Ricci, Henry Povolny, Scott Stevenot | 2021-01-12 |
| 10872748 | Systems and methods for correcting non-uniformities in plasma processing of substrates | Harmeet Singh, Brett C. Richardson, Sung Lee | 2020-12-22 |
| 10804081 | Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber | Ambarish Chhatre, David Schaefer | 2020-10-13 |
| 10804129 | Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode | Christopher Kimball, Alexander Matyushkin, Zhigang Chen, Keith Comendant | 2020-10-13 |
| 10770363 | Power switching system for ESC with array of thermal control elements | Tom Anderson, Keith Comendant, Ralph Jan-Pin Lu, Paul Gordon Robertson, Eric A. Pape +1 more | 2020-09-08 |
| 10720346 | Substrate support with thermal zones for semiconductor processing | Harmeet Singh, Neil Benjamin, Keith Comendant | 2020-07-21 |
| 10690414 | Multi-plane heater for semiconductor substrate support | Benny Wu, Eric A. Pape | 2020-06-23 |
| 10437236 | Method of determining thermal stability of a substrate support assembly | Ole Waldmann, Eric A. Pape, Carlos Leal-Verdugo | 2019-10-08 |
| 10388493 | Component of a substrate support assembly producing localized magnetic fields | Harmeet Singh, Brett C. Richardson, Sung Lee | 2019-08-20 |
| 10381248 | Auto-correction of electrostatic chuck temperature non-uniformity | Benny Wu, Eric A. Pape | 2019-08-13 |
| 10236193 | Substrate supports with multi-layer structure including independent operated heater zones | Harmeet Singh, Neil Benjamin, Keith Comendant | 2019-03-19 |
| 10090211 | Edge seal for lower electrode assembly | Matthew Busche, Anthony J. Ricci, Henry Povolny, Scott Stevenot | 2018-10-02 |
| 10083853 | Electrostatic chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, John Holland, Felix Kozakevich | 2018-09-25 |
| 10056225 | Adjusting substrate temperature to improve CD uniformity | Harmeet Singh, Keith Comendant, Vahid Vahedi | 2018-08-21 |
| 10049948 | Power switching system for ESC with array of thermal control elements | Tom Anderson, Keith Comendant, Ralph Jan-Pin Lu, Paul Gordon Robertson, Eric A. Pape +1 more | 2018-08-14 |