| 10437236 |
Method of determining thermal stability of a substrate support assembly |
Eric A. Pape, Carlos Leal-Verdugo, Keith Gaff |
2019-10-08 |
| 10096506 |
Reducing temperature transition in a substrate support |
Tao Zhang, Eric A. Pape |
2018-10-09 |
| 9922855 |
Method for reducing temperature transition in an electrostatic chuck |
Tao Zhang, Eric A. Pape |
2018-03-20 |
| 9779974 |
System and method for reducing temperature transition in an electrostatic chuck |
Tao Zhang, Eric A. Pape |
2017-10-03 |
| 9716022 |
Method of determining thermal stability of a substrate support assembly |
Eric A. Pape, Carlos Leal-Verdugo, Keith Gaff |
2017-07-25 |
| 9543171 |
Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element |
Eric A. Pape, Keith Gaff, Harmeet Singh |
2017-01-10 |
| 9435692 |
Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output |
Eric A. Pape, Robert Griffith O'Neill, Francisco Martinez |
2016-09-06 |
