Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10437236 | Method of determining thermal stability of a substrate support assembly | Eric A. Pape, Carlos Leal-Verdugo, Keith Gaff | 2019-10-08 |
| 10096506 | Reducing temperature transition in a substrate support | Tao Zhang, Eric A. Pape | 2018-10-09 |
| 9922855 | Method for reducing temperature transition in an electrostatic chuck | Tao Zhang, Eric A. Pape | 2018-03-20 |
| 9779974 | System and method for reducing temperature transition in an electrostatic chuck | Tao Zhang, Eric A. Pape | 2017-10-03 |
| 9716022 | Method of determining thermal stability of a substrate support assembly | Eric A. Pape, Carlos Leal-Verdugo, Keith Gaff | 2017-07-25 |
| 9543171 | Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element | Eric A. Pape, Keith Gaff, Harmeet Singh | 2017-01-10 |
| 9435692 | Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output | Eric A. Pape, Robert Griffith O'Neill, Francisco Martinez | 2016-09-06 |