Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237203 | System, method, and user interface for edge ring wear compensation | Tom A. Kamp | 2025-02-25 |
| 11538713 | System and method for edge ring wear compensation | Tom A. Kamp | 2022-12-27 |
| 10437236 | Method of determining thermal stability of a substrate support assembly | Ole Waldmann, Eric A. Pape, Keith Gaff | 2019-10-08 |
| 9716022 | Method of determining thermal stability of a substrate support assembly | Ole Waldmann, Eric A. Pape, Keith Gaff | 2017-07-25 |