Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387964 | Matched tcr joule heater designs for electrostatic chucks | — | 2025-08-12 |
| 12249490 | Single crystal metal oxide plasma chamber component | Lin Xu, Douglas DETERT, John Daugherty, Pankaj HAZARIKA, Satish SRINIVASAN +5 more | 2025-03-11 |
| 12074049 | Permanent secondary erosion containment for electrostatic chuck bonds | — | 2024-08-27 |
| 12060636 | Method for conditioning a plasma processing chamber | Chiara Helena Catherina Giammanco MacPherson | 2024-08-13 |
| 12020960 | Determining and controlling substrate temperature during substrate processing | Jeremy George SMITH | 2024-06-25 |
| 11791189 | Reflectometer to monitor substrate movement | Dmitry Opaits, Jorge Luque, Jeffrey D. Bonde, Siyuan Tian | 2023-10-17 |
| 11430688 | Two-stage pin lifter for de-chuck operations | Siyuan Tian | 2022-08-30 |
| 11384430 | Method for conditioning a ceramic coating | Hong Shih, Xiaomin Bin, Duane Outka, Gregory A. Pilgrim, Girish M. HUNDI +1 more | 2022-07-12 |
| 11133211 | Ceramic baseplate with channels having non-square corners | Feng Wang | 2021-09-28 |
| 10978323 | Substrate holder having integrated temperature measurement electrical devices | Darrell Ehrlich, Mike Jing | 2021-04-13 |
| 10770363 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Keith Comendant, Ralph Jan-Pin Lu, Paul Gordon Robertson +1 more | 2020-09-08 |
| 10764966 | Laminated heater with different heater trace materials | Yuma Ohkura, Darrell Ehrlich | 2020-09-01 |
| 10707110 | Matched TCR joule heater designs for electrostatic chucks | — | 2020-07-07 |
| 10690414 | Multi-plane heater for semiconductor substrate support | Keith Gaff, Benny Wu | 2020-06-23 |
| 10667379 | Connections between laminated heater and heater voltage inputs | Yuma Ohkura, Darrell Ehrlich | 2020-05-26 |
| 10522377 | System and method for substrate support feed-forward temperature control based on RF power | Tao Zhang, Siyuan Tian, Jorge Jose Zaninovich | 2019-12-31 |
| 10437236 | Method of determining thermal stability of a substrate support assembly | Ole Waldmann, Carlos Leal-Verdugo, Keith Gaff | 2019-10-08 |
| 10381248 | Auto-correction of electrostatic chuck temperature non-uniformity | Benny Wu, Keith Gaff | 2019-08-13 |
| 10340171 | Permanent secondary erosion containment for electrostatic chuck bonds | — | 2019-07-02 |
| 10306776 | Substrate processing system printed-circuit control board assembly with one or more heater layers | Changyou Jing, Fred Dennis Egley | 2019-05-28 |
| 10186437 | Substrate holder having integrated temperature measurement electrical devices | Darrell Ehrlich, Mike Jing | 2019-01-22 |
| 10096506 | Reducing temperature transition in a substrate support | Tao Zhang, Ole Waldmann | 2018-10-09 |
| 10049948 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Keith Comendant, Ralph Jan-Pin Lu, Paul Gordon Robertson +1 more | 2018-08-14 |
| 9922855 | Method for reducing temperature transition in an electrostatic chuck | Tao Zhang, Ole Waldmann | 2018-03-20 |
| 9779974 | System and method for reducing temperature transition in an electrostatic chuck | Tao Zhang, Ole Waldmann | 2017-10-03 |