Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716022 | Method of determining thermal stability of a substrate support assembly | Ole Waldmann, Carlos Leal-Verdugo, Keith Gaff | 2017-07-25 |
| 9543171 | Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element | Ole Waldmann, Keith Gaff, Harmeet Singh | 2017-01-10 |
| 9435692 | Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output | Ole Waldmann, Robert Griffith O'Neill, Francisco Martinez | 2016-09-06 |
| 9012243 | Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis | Yoshie Kimura, Tom A. Kamp, Rohit DeshPande, Keith Gaff, Gowri Kamarthy | 2015-04-21 |
| 8852964 | Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis | Yoshie Kimura, Tom A. Kamp, Rohit DeshPande, Keith Gaff, Gowri Kamarthy | 2014-10-07 |
| 8522716 | Protective coating for a plasma processing chamber part and a method of use | Bobby Kadkhodayan, Jon McChesney, Rajinder Dhindsa | 2013-09-03 |
| 8473089 | Methods and apparatus for predictive preventive maintenance of processing chambers | Luc Albarede, Vijayakumar C. Venugopal, Brian Choi | 2013-06-25 |
| 8358416 | Methods and apparatus for normalizing optical emission spectra | Vijayakumar C. Venugopal, Jean-Paul Booth | 2013-01-22 |
| 8144328 | Methods and apparatus for normalizing optical emission spectra | Vijayakumar C. Venugopal, Jean-Paul Booth | 2012-03-27 |
| 7952694 | Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials | Bradley J. Howard, Siwen Li | 2011-05-31 |
| 7907260 | Collimator arrangements including multiple collimators and implementation methods thereof | Vijayakumar C. Venugopal | 2011-03-15 |
| 7884925 | Electrical and optical system and methods for monitoring erosion of electrostatic chuck edge bead materials | Bradley J. Howard, Siwen Li | 2011-02-08 |
| 6813097 | Lenses capable of post-fabrication modulus change | Jagdish M. Jethmalani, Robert H. Grubbs, Julia A. Kornfield, Daniel M. Schwartz, Christian A. Sandstedt | 2004-11-02 |