Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237154 | Bottom and middle edge rings | Hiran R. Rathnasinghe, Shawn Tokairin | 2025-02-25 |
| 12230482 | Moveable edge ring designs | Hiran R. Rathnasinghe | 2025-02-18 |
| 12183554 | Bottom and middle edge rings | Hiran R. Rathnasinghe, Shawn Tokairin | 2024-12-31 |
| 12027410 | Edge ring arrangement with moveable edge rings | Haoquan Yan, Robert Griffith O'Neill, Raphael Casaes, Alex Paterson | 2024-07-02 |
| 11887819 | Systems for cooling RF heated chamber components | Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson, John Holland | 2024-01-30 |
| 11692732 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, John Drewery, Alex Paterson | 2023-07-04 |
| 11605546 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Alex Paterson | 2023-03-14 |
| 11495441 | Systems for cooling RF heated chamber components | Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson, John Holland | 2022-11-08 |
| 11011353 | Systems and methods for performing edge ring characterization | Marcus Musselman, Andrew D. Bailey, III | 2021-05-18 |
| 10957521 | Image based plasma sheath profile detection on plasma processing tools | Yuhou Wang, Michael J. Martin, Alexander Paterson | 2021-03-23 |
| 10825661 | Systems for cooling RF heated chamber components | Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson, John Holland | 2020-11-03 |
| 10770339 | Automated replacement of consumable parts using interfacing chambers | Damon Tyrone Genetti, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2020-09-08 |
| 10690374 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, John Drewery, Alex Paterson | 2020-06-23 |
| 10658222 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Haoquan Yan, Robert Griffith O'Neill, Raphael Casaes, Alex Paterson | 2020-05-19 |
| 10651013 | Systems and methods for tuning to reduce reflected power in multiple states | Alexander Paterson | 2020-05-12 |
| 10600620 | Temperature control in RF chamber with heater and air amplifier | Alex Paterson | 2020-03-24 |
| 10541168 | Edge ring centering method using ring dynamic alignment data | Ali Sucipto Tan, Haoquan Yan, Marc Estoque, Damon Tyrone Genetti, Alexander Paterson | 2020-01-21 |
| 10427307 | Automated replacement of consumable parts using end effectors interfacing with plasma processing system | Damon Tyrone Genetti, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2019-10-01 |
| 10410836 | Systems and methods for tuning to reduce reflected power in multiple states | Alexander Paterson | 2019-09-10 |
| 10304717 | Automated replacement of consumable parts using interfacing chambers | Damon Tyrone Genetti, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2019-05-28 |
| 10242844 | Rotating RF electric field antenna for uniform plasma generation | Alex Paterson | 2019-03-26 |
| 10124492 | Automated replacement of consumable parts using end effectors interfacing with plasma processing system | Damon Tyrone Genetti, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2018-11-13 |
| 10062599 | Automated replacement of consumable parts using interfacing chambers | Damon Tyrone Genetti, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2018-08-28 |
| 9978565 | Systems for cooling RF heated chamber components | Saravanapriyan Sriraman, Ricky Marsh, Alex Paterson, John Holland | 2018-05-22 |
| 9885493 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, John Drewery, Alex Paterson | 2018-02-06 |