Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027410 | Edge ring arrangement with moveable edge rings | Haoquan Yan, Robert Griffith O'Neill, Jon McChesney, Alex Paterson | 2024-07-02 |
| 11798789 | Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features | Alejandro SANCHEZ, Grayson Ford, Darrell Ehrlich, Aravind Alwan, Kevin Ka Kei Leung +3 more | 2023-10-24 |
| 10658222 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Haoquan Yan, Robert Griffith O'Neill, Jon McChesney, Alex Paterson | 2020-05-19 |
| 9029267 | Controlling temperature of a faraday shield | Sanket Sant | 2015-05-12 |
| 8525139 | Method and apparatus of halogen removal | Harmeet Singh, Sanket Sant, Shang-I Chou, Vahid Vahedi, Seetharaman Ramachandran | 2013-09-03 |
| 8216388 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Hong Shih, Qian Fu, Tuochuan Huang, Duane Outka | 2012-07-10 |
| 7976641 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Hong Shih, Qian Fu, Tuochuan Huang, Duane Outka | 2011-07-12 |
| 7638004 | Method for cleaning microwave applicator tube | Hong Shih, Harmeet Singh, Duane Outka, Mohammad Kamarehi | 2009-12-29 |