Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087561 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2024-09-10 |
| 12027410 | Edge ring arrangement with moveable edge rings | Robert Griffith O'Neill, Raphael Casaes, Jon McChesney, Alex Paterson | 2024-07-02 |
| 11710623 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2023-07-25 |
| 11031215 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2021-06-08 |
| 10658222 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Robert Griffith O'Neill, Raphael Casaes, Jon McChesney, Alex Paterson | 2020-05-19 |
| 10541168 | Edge ring centering method using ring dynamic alignment data | Ali Sucipto Tan, Marc Estoque, Damon Tyrone Genetti, Jon McChesney, Alexander Paterson | 2020-01-21 |