Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087561 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, Haoquan Yan, John Daugherty, Ming-Kuei Tseng +1 more | 2024-09-10 |
| 11710623 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, Haoquan Yan, John Daugherty, Ming-Kuei Tseng +1 more | 2023-07-25 |
| 11031215 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, Haoquan Yan, John Daugherty, Ming-Kuei Tseng +1 more | 2021-06-08 |
| 10541168 | Edge ring centering method using ring dynamic alignment data | Haoquan Yan, Marc Estoque, Damon Tyrone Genetti, Jon McChesney, Alexander Paterson | 2020-01-21 |