Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412670 | System, method and apparatus for RF power compensation in plasma etch chamber | Robert Griffith O'Neill, Arthur H. Sato, Eric Tonnis, Shang-I Chou | 2016-08-09 |
| 8525139 | Method and apparatus of halogen removal | Harmeet Singh, Sanket Sant, Shang-I Chou, Vahid Vahedi, Raphael Casaes | 2013-09-03 |