Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288702 | Semiconductor wafer mass metrology apparatus and semiconductor wafer mass metrology method | Gregor Robert ELLIOTT | 2025-04-29 |
| 9412670 | System, method and apparatus for RF power compensation in plasma etch chamber | Robert Griffith O'Neill, Arthur H. Sato, Seetharaman Ramachandran, Shang-I Chou | 2016-08-09 |