Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798789 | Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features | Grayson Ford, Darrell Ehrlich, Aravind Alwan, Kevin Ka Kei Leung, Anthony Contreras +3 more | 2023-10-24 |