Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12168301 | Fixture for automatic calibration of substrate transfer robot | Richard M. Blank, Behnam BEHZIZ, Peter Thaulad, Mark E. Emerson | 2024-12-17 |
| 11798789 | Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features | Alejandro SANCHEZ, Grayson Ford, Darrell Ehrlich, Kevin Ka Kei Leung, Anthony Contreras +3 more | 2023-10-24 |