Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341040 | Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check | Hossein Sadeghi, Richard M. Blank, Peter Thaulad, Arulselvam Simon Jeyapalan, Marco Piccigallo | 2025-06-24 |
| 12168301 | Fixture for automatic calibration of substrate transfer robot | Richard M. Blank, Aravind Alwan, Behnam BEHZIZ, Peter Thaulad | 2024-12-17 |
| 12050112 | Distance measurement between gas distribution device and substrate support at high temperatures | Nick Ray Linebarger, Jr. | 2024-07-30 |
| 11408734 | Distance measurement between gas distribution device and substrate support at high temperatures | Nick Ray Linebarger, Jr. | 2022-08-09 |
| 10989747 | Apparatus for measuring condition of electroplating cell components and associated methods | Steven T. Mayer, Lawrence Ossowski | 2021-04-27 |
| 10436829 | Apparatus for measuring condition of electroplating cell components and associated methods | Steven T. Mayer, Lawrence Ossowski | 2019-10-08 |
| 9754764 | Method for coincident alignment of a laser beam and a charged particle beam | Marcus Straw | 2017-09-05 |
| 9679741 | Environmental cell for charged particle beam system | Libor Novak, Marek Uncovsky, Milos Toth, Martin Cafourek, William Parker +1 more | 2017-06-13 |
| 9263235 | Method for coincident alignment of a laser beam and a charged particle beam | Marcus Straw | 2016-02-16 |
| 8766213 | Automated method for coincident alignment of a laser beam and a charged particle beam | Marcus Straw | 2014-07-01 |