Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for measuring condition of electroplating cell components and associated methods

Apparatus for measuring condition of electroplating cell components and associated methods

US Patent 10989747 · Granted Apr 27, 2021

Estimated economic value: $283,748,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Byproduct removal from electroplating solutions2025
Integrated adaptive positioning systems and routines for automated wafer-handlin2025
TSV process window and fill performance enhancement by long pulsing and ramping2025
Gold through silicon mask plating2025
Wafer shielding for prevention of lipseal plate-out2025
Fixture for automatic calibration of substrate transfer robot2024
Distance measurement between gas distribution device and substrate support at hi2024
Electro-oxidative metal removal in through mask interconnect fabrication2023
Electroplating apparatus for tailored uniformity profile2023
Cleaning electroplating substrate holders using reverse current deplating2023
Distance measurement between gas distribution device and substrate support at hi2022
Dynamic modulation of cross flow manifold during elecroplating2021