Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398464 | Substrate pedestal including backside gas-delivery tube | Troy Alan Gomm | 2025-08-26 |
| 12338531 | Spatially tunable deposition to compensate within wafer differential bow | Fayaz Shaikh, Adriana Vintila, Matthew Mudrow, Xin Yin, James Lee +1 more | 2025-06-24 |
| 12272591 | Friction stir welding in semiconductor manufacturing applications | Prahalad Narasinghdas Agarwal, Ravikumar Patil, Damodar Rajaram Shanbhag | 2025-04-08 |
| 12050112 | Distance measurement between gas distribution device and substrate support at high temperatures | Mark E. Emerson | 2024-07-30 |
| 11946142 | Spatially tunable deposition to compensate within wafer differential bow | Fayaz Shaikh, Adriana Vintila, Matthew Mudrow, Xin Yin, James Lee +1 more | 2024-04-02 |
| 11851760 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Curtis Bailey | 2023-12-26 |
| 11725283 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Curtis Bailey | 2023-08-15 |
| 11634817 | Substrate pedestal including backside gas-delivery tube | Troy Alan Gomm | 2023-04-25 |
| 11441222 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Curtis Bailey | 2022-09-13 |
| 11408734 | Distance measurement between gas distribution device and substrate support at high temperatures | Mark E. Emerson | 2022-08-09 |
| 10903070 | Asymmetric wafer bow compensation by chemical vapor deposition | Chanyuan Liu, Fayaz Shaikh, Niraj Rana | 2021-01-26 |
| 10872747 | Controlling showerhead heating via resistive thermal measurements | Curtis Bailey, Easwar Srinivasan, Devon Pelkey | 2020-12-22 |
| 10851457 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Curtis Bailey | 2020-12-01 |
| 10655225 | Substrate pedestal module including backside gas delivery tube and method of making | Troy Alan Gomm | 2020-05-19 |
| 10242848 | Carrier ring structure and chamber systems including the same | Eli Jeon, Sirish Reddy, Alice Hollister, Rungthiwa Methaapanon | 2019-03-26 |
| 9738975 | Substrate pedestal module including backside gas delivery tube and method of making | Troy Alan Gomm | 2017-08-22 |