Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12410521 | Bidirectional indexing apparatus | Adriana Vintila | 2025-09-09 |
| 12338531 | Spatially tunable deposition to compensate within wafer differential bow | Fayaz Shaikh, Adriana Vintila, Nick Ray Linebarger, Jr., Xin Yin, James Lee +1 more | 2025-06-24 |
| 12215804 | Cooling of air actuated valve using actuating air | Adriana Vintila | 2025-02-04 |
| 11946142 | Spatially tunable deposition to compensate within wafer differential bow | Fayaz Shaikh, Adriana Vintila, Nick Ray Linebarger, Jr., Xin Yin, James Lee +1 more | 2024-04-02 |
| 10354857 | High power low pressure UV bulb with plasma resistant coating | Xiaolan Chen, Curtis Bailey, Stephen Yu-Hong Lau, Mitchell Lamar | 2019-07-16 |
| 10161034 | Rapid chamber clean using concurrent in-situ and remote plasma sources | Keith Fox, Jonathan Church, James Lee, Kevin Gerber | 2018-12-25 |
| 10147597 | Turbulent flow spiral multi-zone precursor vaporizer | James Lee, Mitchell Lamar, Mathew Joseph Weissinger, Damodar Rajaram Shanbhag | 2018-12-04 |