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Spatially tunable deposition to compensate within wafer differential bow |
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Remote-plasma clean (RPC) directional-flow device |
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Method and apparatuses for reducing porogen accumulation from a UV-cure chamber |
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Clean resistant windows for ultraviolet thermal processing |
George Andrew Antonelli, Kevin McLaughlin, Andrew John McKerrow, Curtis Bailey, Alexander R. Fox +5 more |
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Rapid chamber clean using concurrent in-situ and remote plasma sources |
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Mitchell Lamar, Matthew Mudrow, Mathew Joseph Weissinger, Damodar Rajaram Shanbhag |
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Method and apparatuses for reducing porogen accumulation from a UV-cure chamber |
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Exhaust flow spreading baffle-riser to optimize remote plasma window clean |
Lisa Gytri, Stephen Yu-Hong Lau |
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Method for using a purge ring with split baffles in photonic thermal processing systems |
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2014-11-11 |
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Reduction of a process volume of a processing chamber using a nested dynamic inert volume |
— |
2014-08-12 |
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Purge ring with split baffles for photonic thermal processing systems |
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2013-12-17 |
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Method and apparatuses for reducing porogen accumulation from a UV-cure chamber |
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2012-10-09 |
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Multi-tray fireplace tray system |
— |
2005-11-29 |
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Fireplace grate |
— |
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Workpiece carrier with adjustable pressure zones and barriers |
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Overhead door failure prevention system and method of using same |
Joseph J. Krsnak |
2001-11-20 |
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Large vehicle entrance door safety system and method |
— |
1990-09-11 |
| 4621608 |
Portable barbecue system |
— |
1986-11-11 |
| 4526158 |
Portable barbecue system |
— |
1985-07-02 |
