ES

Eugene Smargiassi

NS Novellus Systems: 14 patents #59 of 780Top 8%
Applied Materials: 4 patents #2,506 of 7,310Top 35%
Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #236,937 of 4,157,543Top 6%
19
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11177131 Method and apparatuses for reducing porogen accumulation from a UV-cure chamber Lisa Gytri, Jeff Gordon, James Lee, Carmen Balderrama, Joseph Brett Harris +3 more 2021-11-16
10240236 Clean resistant windows for ultraviolet thermal processing James Lee, George Andrew Antonelli, Kevin McLaughlin, Andrew John McKerrow, Curtis Bailey +5 more 2019-03-26
10121682 Purging of porogen from UV cure chamber Stephen Yu-Hong Lau, George D. Kamian, Ming Xi 2018-11-06
10020197 Method for reducing porogen accumulation from a UV-cure chamber Lisa Gytri, Jeff Gordon, James Lee, Carmen Balderrama, Joseph Brett Harris +3 more 2018-07-10
9873946 Multi-station sequential curing of dielectric films Jason Dirk Haverkamp, Dennis M. Hausmann, Kevin McLaughlin, Krishnan Shrinivasan, Michael Rivkin +1 more 2018-01-23
9384959 Purging of porogen from UV cure chamber Stephen Yu-Hong Lau, George D. Kamian, Ming Xi 2016-07-05
9073100 Method and apparatuses for reducing porogen accumulation from a UV-cure chamber Lisa Gytri, Jeff Gordon, James Lee, Carmen Balderrama, Joseph Brett Harris +3 more 2015-07-07
8980769 Multi-station sequential curing of dielectric films Jason Dirk Haverkamp, Dennis M. Hausmann, Kevin McLaughlin, Krishnan Shrinivasan, Michael Rivkin +1 more 2015-03-17
8734663 Purging of porogen from UV cure chamber Stephen Yu-Hong Lau, George D. Kamian, Ming Xi 2014-05-27
8629068 Multi-station sequential curing of dielectric films Krishnan Shrinivasan, Michael Rivkin, Mohamed Sabri 2014-01-14
8518210 Purging of porogen from UV cure chamber Stephen Yu-Hong Lau, George D. Kamian, Ming Xi 2013-08-27
8454750 Multi-station sequential curing of dielectric films Krishnan Shrinivasan, Michael Rivkin, Mohamed Sabri 2013-06-04
8282768 Purging of porogen from UV cure chamber Stephen Yu-Hong Lau, George D. Kamian, Ming Xi 2012-10-09
8283644 Measuring in-situ UV intensity in UV cure tool Boaz Kenane, James Lee, Xiaolan Chen 2012-10-09
7935940 Measuring in-situ UV intensity in UV cure tool 2011-05-03
6807972 Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber Ho-Man Rodney Chiu, Steven Verhaverbeke, Brian H. Burrows 2004-10-26
6535628 Detection of wafer fragments in a wafer processing apparatus Wayez R. Ahmad 2003-03-18
6515261 Enhanced lift pin Aaron Muir Hunter 2003-02-04
6231716 Processing chamber with rapid wafer exchange Anthony F. White 2001-05-15