Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8668868 | Methods and apparatus for smart abatement using an improved fuel circuit | Daniel O. Clark, Shaun W. Crawford, Jay J. Jung, Youssef A. Loldj, Robbert M. Vermeulen | 2014-03-11 |
| 8095240 | Methods for starting and operating a thermal abatement system | Daniel O. Clark, Shaun W. Crawford, Jay J. Jung, Youssef A. Loldj, Robbert M. Vermeulen | 2012-01-10 |
| 7985379 | Reactor design to reduce particle deposition during process abatement | Daniel O. Clark, Shaun W. Crawford, Jay J. Jung, Leonard B. Todd, Robbert M. Vermeulen | 2011-07-26 |
| 7736599 | Reactor design to reduce particle deposition during process abatement | Daniel O. Clark, Shaun W. Crawford, Jay J. Jung, Leonard B. Todd, Robbert M. Vermeulen | 2010-06-15 |
| 7682574 | Safety, monitoring and control features for thermal abatement reactor | Daniel O. Clark, Shaun W. Crawford, Jay J. Jung, Youssef A. Loldj, Robbert M. Vermeulen | 2010-03-23 |
| 7201808 | Method and apparatus for rotating a semiconductor substrate | Steven Verhaverbeke, John Lewis | 2007-04-10 |
| 6807972 | Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber | Eugene Smargiassi, Steven Verhaverbeke, Brian H. Burrows | 2004-10-26 |