Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11110392 | Apparatus for treating exhaust gas in a processing system | Colin John Dickinson, Mehran Moalem | 2021-09-07 |
| 11049735 | Methods and apparatus for conserving electronic device manufacturing resources | Phil Chandler, Jay J. Jung | 2021-06-29 |
| 10722840 | Methods for treating exhaust gas in a processing system | Colin John Dickinson, Mehran Moalem | 2020-07-28 |
| 10452039 | Integrated controller solution for monitoring and controlling manufacturing equipment | Youssef A. Loldj, Shaun W. Crawford, Maxime Cayer, Tony H. Tong, Eric Rieske | 2019-10-22 |
| 9740182 | Integrated controller solution for monitoring and controlling manufacturing equipment | Youssef A. Loldj, Shaun W. Crawford, Maxime Cayer, Tony H. Tong, Eric Rieske | 2017-08-22 |
| 9685352 | Apparatus for conserving electronic device manufacturing resources including ozone | Phil Chandler, Jay J. Jung | 2017-06-20 |
| 9597634 | Methods and apparatus for treating exhaust gas in a processing system | Colin John Dickinson, Mehran Moalem | 2017-03-21 |
| 9387428 | Systems and methods for treating flammable effluent gases from manufacturing processes | Mehran Moalem, Robbert M. Vermeulen, Phil Chandler | 2016-07-12 |
| 9075408 | Energy savings and global gas emissions monitoring and display | Youssef A. Loldj, Maxime Cayer, Jay J. Jung, Shaun W. Crawford, Dana Tribula | 2015-07-07 |
| 8974605 | Methods and apparatus for conserving electronic device manufacturing resources | Phil Chandler, Jay J. Jung | 2015-03-10 |
| 8747762 | Methods and apparatus for treating exhaust gas in a processing system | Colin John Dickinson, Mehran Moalem | 2014-06-10 |
| 8668868 | Methods and apparatus for smart abatement using an improved fuel circuit | Ho-Man Rodney Chiu, Shaun W. Crawford, Jay J. Jung, Youssef A. Loldj, Robbert M. Vermeulen | 2014-03-11 |
| 8455368 | Methods and apparatus for assembling and operating electronic device manufacturing systems | Phil Chandler, Robbert M. Vermeulen, Jay J. Jung, Roger M. Johnson, Youssef A. Loldj +1 more | 2013-06-04 |
| 8095240 | Methods for starting and operating a thermal abatement system | Ho-Man Rodney Chiu, Shaun W. Crawford, Jay J. Jung, Youssef A. Loldj, Robbert M. Vermeulen | 2012-01-10 |
| 7985379 | Reactor design to reduce particle deposition during process abatement | Ho-Man Rodney Chiu, Shaun W. Crawford, Jay J. Jung, Leonard B. Todd, Robbert M. Vermeulen | 2011-07-26 |
| 7736599 | Reactor design to reduce particle deposition during process abatement | Ho-Man Rodney Chiu, Shaun W. Crawford, Jay J. Jung, Leonard B. Todd, Robbert M. Vermeulen | 2010-06-15 |
| 7736600 | Apparatus for manufacturing a process abatement reactor | Sebastien Raoux, Robbert M. Vermeulen, Shaun W. Crawford | 2010-06-15 |
| 7700049 | Methods and apparatus for sensing characteristics of the contents of a process abatement reactor | Sebastien Raoux, Robert M. Vermeulen, Shaun W. Crawford | 2010-04-20 |
| 7682574 | Safety, monitoring and control features for thermal abatement reactor | Ho-Man Rodney Chiu, Shaun W. Crawford, Jay J. Jung, Youssef A. Loldj, Robbert M. Vermeulen | 2010-03-23 |
| 6596054 | Method for carbon monoxide reduction during thermal/wet abatement of organic compounds | Belynda Flippo, Robbert Vermuellen | 2003-07-22 |
| 6551381 | Method for carbon monoxide reduction during thermal/wet abatement of organic compounds | Belynda Flippo, Robbert Vermuellen | 2003-04-22 |
| 6527828 | Oxygen enhanced CDA modification to a CDO integrated scrubber | Belynda Flippo, Keith Karrup, Robbert M. Vermeulen | 2003-03-04 |
| 6511641 | Method for abatement of gaseous pollutants | Timothy L. Herman, Jack Ellis, Floris Y. Tsang, Belynda Flippo, David Inori +3 more | 2003-01-28 |
| 6261524 | Advanced apparatus for abatement of gaseous pollutants | Timothy L. Herman, Jack Ellis, Floris Y. Tsang, Belynda Flippo, David Inori +3 more | 2001-07-17 |
| 6199927 | Robot blade for handling of semiconductor substrates | Behzad Shamlou, Wen-Chiang Tu, Xuyen Pham, Yu-Chia Chang, Shun Wu | 2001-03-13 |