| 11110392 |
Apparatus for treating exhaust gas in a processing system |
Colin John Dickinson, Mehran Moalem |
2021-09-07 |
$49,370,000 |
| 11049735 |
Methods and apparatus for conserving electronic device manufacturing resources |
Phil Chandler, Jay J. Jung |
2021-06-29 |
$47,858,000 |
| 10722840 |
Methods for treating exhaust gas in a processing system |
Colin John Dickinson, Mehran Moalem |
2020-07-28 |
$35,855,000 |
| 10452039 |
Integrated controller solution for monitoring and controlling manufacturing equipment |
Youssef A. Loldj, Shaun W. Crawford, Maxime Cayer, Tony H. Tong, Eric Rieske |
2019-10-22 |
$16,291,000 |
| 9740182 |
Integrated controller solution for monitoring and controlling manufacturing equipment |
Youssef A. Loldj, Shaun W. Crawford, Maxime Cayer, Tony H. Tong, Eric Rieske |
2017-08-22 |
$17,010,000 |
| 9685352 |
Apparatus for conserving electronic device manufacturing resources including ozone |
Phil Chandler, Jay J. Jung |
2017-06-20 |
$22,588,000 |
| 9597634 |
Methods and apparatus for treating exhaust gas in a processing system |
Colin John Dickinson, Mehran Moalem |
2017-03-21 |
$25,880,000 |
| 9387428 |
Systems and methods for treating flammable effluent gases from manufacturing processes |
Mehran Moalem, Robbert M. Vermeulen, Phil Chandler |
2016-07-12 |
$13,832,000 |
| 9075408 |
Energy savings and global gas emissions monitoring and display |
Youssef A. Loldj, Maxime Cayer, Jay J. Jung, Shaun W. Crawford, Dana Tribula |
2015-07-07 |
$12,656,000 |
| 8974605 |
Methods and apparatus for conserving electronic device manufacturing resources |
Phil Chandler, Jay J. Jung |
2015-03-10 |
$17,071,000 |
| 8747762 |
Methods and apparatus for treating exhaust gas in a processing system |
Colin John Dickinson, Mehran Moalem |
2014-06-10 |
$12,688,000 |
| 8668868 |
Methods and apparatus for smart abatement using an improved fuel circuit |
Ho-Man Rodney Chiu, Shaun W. Crawford, Jay J. Jung, Youssef A. Loldj, Robbert M. Vermeulen |
2014-03-11 |
$12,153,000 |
| 8455368 |
Methods and apparatus for assembling and operating electronic device manufacturing systems |
Phil Chandler, Robbert M. Vermeulen, Jay J. Jung, Roger M. Johnson, Youssef A. Loldj +1 more |
2013-06-04 |
$7,195,000 |
| 8095240 |
Methods for starting and operating a thermal abatement system |
Ho-Man Rodney Chiu, Shaun W. Crawford, Jay J. Jung, Youssef A. Loldj, Robbert M. Vermeulen |
2012-01-10 |
$12,154,000 |
| 7985379 |
Reactor design to reduce particle deposition during process abatement |
Ho-Man Rodney Chiu, Shaun W. Crawford, Jay J. Jung, Leonard B. Todd, Robbert M. Vermeulen |
2011-07-26 |
$10,864,000 |
| 7736599 |
Reactor design to reduce particle deposition during process abatement |
Ho-Man Rodney Chiu, Shaun W. Crawford, Jay J. Jung, Leonard B. Todd, Robbert M. Vermeulen |
2010-06-15 |
$8,018,000 |
| 7736600 |
Apparatus for manufacturing a process abatement reactor |
Sebastien Raoux, Robbert M. Vermeulen, Shaun W. Crawford |
2010-06-15 |
$8,018,000 |
| 7700049 |
Methods and apparatus for sensing characteristics of the contents of a process abatement reactor |
Sebastien Raoux, Robert M. Vermeulen, Shaun W. Crawford |
2010-04-20 |
$11,275,000 |
| 7682574 |
Safety, monitoring and control features for thermal abatement reactor |
Ho-Man Rodney Chiu, Shaun W. Crawford, Jay J. Jung, Youssef A. Loldj, Robbert M. Vermeulen |
2010-03-23 |
$9,727,000 |
| 6596054 |
Method for carbon monoxide reduction during thermal/wet abatement of organic compounds |
Belynda Flippo, Robbert Vermuellen |
2003-07-22 |
$3,416,000 |
| 6551381 |
Method for carbon monoxide reduction during thermal/wet abatement of organic compounds |
Belynda Flippo, Robbert Vermuellen |
2003-04-22 |
$9,122,000 |
| 6527828 |
Oxygen enhanced CDA modification to a CDO integrated scrubber |
Belynda Flippo, Keith Karrup, Robbert M. Vermeulen |
2003-03-04 |
$3,879,000 |
| 6511641 |
Method for abatement of gaseous pollutants |
Timothy L. Herman, Jack Ellis, Floris Y. Tsang, Belynda Flippo, David Inori +3 more |
2003-01-28 |
$2,653,000 |
| 6261524 |
Advanced apparatus for abatement of gaseous pollutants |
Timothy L. Herman, Jack Ellis, Floris Y. Tsang, Belynda Flippo, David Inori +3 more |
2001-07-17 |
$7,003,000 |
| 6199927 |
Robot blade for handling of semiconductor substrates |
Behzad Shamlou, Wen-Chiang Tu, Xuyen Pham, Yu-Chia Chang, Shun Wu |
2001-03-13 |
$75,587,000 |
