Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11110392 | Apparatus for treating exhaust gas in a processing system | Colin John Dickinson, Daniel O. Clark | 2021-09-07 |
| 10722840 | Methods for treating exhaust gas in a processing system | Colin John Dickinson, Daniel O. Clark | 2020-07-28 |
| 9597634 | Methods and apparatus for treating exhaust gas in a processing system | Colin John Dickinson, Daniel O. Clark | 2017-03-21 |
| 9387428 | Systems and methods for treating flammable effluent gases from manufacturing processes | Daniel O. Clark, Robbert M. Vermeulen, Phil Chandler | 2016-07-12 |
| 9080576 | Method and apparatus for controlling a processing system | Youssef A. Loldj, Jay J. Jung, Paul Fisher, Joshua Putz, Andreas Neuber | 2015-07-14 |
| 8747762 | Methods and apparatus for treating exhaust gas in a processing system | Colin John Dickinson, Daniel O. Clark | 2014-06-10 |
| 6468490 | Abatement of fluorine gas from effluent | Shamouil Shamouilian, Tony Kaushal | 2002-10-22 |
| 6367412 | Porous ceramic liner for a plasma source | Kartik Ramaswamy, Kwok Manus Wong, Ashish Bhatnagar, Tony Kaushal, Shamouil Shamouilian | 2002-04-09 |
| 5861346 | Process for forming silicon carbide films and microcomponents | Alex V. Hamza, Mehdi Balooch | 1999-01-19 |