| 11110392 |
Apparatus for treating exhaust gas in a processing system |
Colin John Dickinson, Daniel O. Clark |
2021-09-07 |
| 10722840 |
Methods for treating exhaust gas in a processing system |
Colin John Dickinson, Daniel O. Clark |
2020-07-28 |
| 9597634 |
Methods and apparatus for treating exhaust gas in a processing system |
Colin John Dickinson, Daniel O. Clark |
2017-03-21 |
| 9387428 |
Systems and methods for treating flammable effluent gases from manufacturing processes |
Daniel O. Clark, Robbert M. Vermeulen, Phil Chandler |
2016-07-12 |
| 9080576 |
Method and apparatus for controlling a processing system |
Youssef A. Loldj, Jay J. Jung, Paul Fisher, Joshua Putz, Andreas Neuber |
2015-07-14 |
| 8747762 |
Methods and apparatus for treating exhaust gas in a processing system |
Colin John Dickinson, Daniel O. Clark |
2014-06-10 |
| 6468490 |
Abatement of fluorine gas from effluent |
Shamouil Shamouilian, Tony Kaushal |
2002-10-22 |
| 6367412 |
Porous ceramic liner for a plasma source |
Kartik Ramaswamy, Kwok Manus Wong, Ashish Bhatnagar, Tony Kaushal, Shamouil Shamouilian |
2002-04-09 |
| 5861346 |
Process for forming silicon carbide films and microcomponents |
Alex V. Hamza, Mehdi Balooch |
1999-01-19 |
