| 12172264 |
Carrier head membrane with regions of different roughness |
Young J. Paik, Kadthala Ramaya Narendrnath |
2024-12-24 |
$95,614,000 |
| 11738421 |
Method of making carrier head membrane with regions of different roughness |
Young J. Paik, Kadthala Ramaya Narendrnath |
2023-08-29 |
$78,061,000 |
| 11007619 |
Carrier head membrane with regions of different roughness |
Young J. Paik, Kadthala Ramaya Narendrnath |
2021-05-18 |
$51,490,000 |
| 10177014 |
Thermal radiation barrier for substrate processing chamber components |
Govinda Raj, Daniel L. Martin, Robert T. Hirahara, Bopanna Vasanth, Prashanth Rao +1 more |
2019-01-08 |
$16,165,000 |
| 10168229 |
EMI/RF shielding of thermocouples |
Govinda Raj, Bopanna Ichettria Vasantha, Cariappa Baduvamanda |
2019-01-01 |
|
| 10160093 |
Carrier head membrane roughness to control polishing rate |
Young J. Paik, Kadthala Ramaya Narendrnath |
2018-12-25 |
|
| 10131126 |
Methods for bonding substrates |
Kadthala Ramaya Narendrnath, Gangadhar Sheelavant, Monika Agarwal |
2018-11-20 |
$33,309,000 |
| 9960019 |
Life enhancement of ring assembly in semiconductor manufacturing chambers |
Sandhya Arun, Prashanth Kodigepalli, Padma Gopalakrishnan, Dan Martin, Christopher Heath John Hossack |
2018-05-01 |
$18,276,000 |
| 9823133 |
EMI/RF shielding of thermocouples |
Govinda Raj, Bopanna Ichettria, Cariappa Baduvamanda |
2017-11-21 |
$47,081,000 |
| 9627231 |
Methods for bonding substrates |
Kadthala Ramaya Narendrnath, Gangadhar Sheelavant, Monika Agarwal |
2017-04-18 |
$41,811,000 |
| 9481608 |
Surface annealing of components for substrate processing chambers |
Laxman Murugesh, Padma Gopalakrishnan |
2016-11-01 |
$29,038,000 |
| 9227297 |
Retaining ring with attachable segments |
Irfanulla Khuddus Rahmathullah, Bopanna Ichettira Vansantha, Padma Gopalakrishnan, Abraham Palaty, Aswathnarayanaiah Ravi +3 more |
2016-01-05 |
$12,358,000 |
| 9168631 |
Two-part retaining ring with interlock features |
Irfanulla Khuddus Rahmathullah, Bopanna Ichettira Vansantha, Padma Gopalakrishnan, Aswathnarayanaiah Ravi, Abraham Palaty +3 more |
2015-10-27 |
$16,675,000 |
| 8740206 |
Life enhancement of ring assembly in semiconductor manufacturing chambers |
Sandhya Arun, Prashanth Kodigepalli, Padma Gopalakrishnan, Dan Martin, Christopher Heath John Hossack |
2014-06-03 |
$21,001,000 |
| 8722389 |
Method and system of culturing an algal mat |
Keshav C. Das, Benjamin R. Cannon, Senthil Chinnasamy |
2014-05-13 |
|
| 8662957 |
Leak proof pad for CMP endpoint detection |
Young J. Paik, Christopher R. Mahon, Kadthala Ramaya Narendrnath |
2014-03-04 |
$12,560,000 |
| 8617672 |
Localized surface annealing of components for substrate processing chambers |
Laxman Murugesh, Padma Gopalakrishnan |
2013-12-31 |
$7,926,000 |
| 8475231 |
Carrier head membrane |
Young J. Paik, Kadthala Ramaya Narendrnath |
2013-07-02 |
$11,179,000 |
| 8464594 |
Measuring flow properties of multiple gas nozzles of a gas distributor |
Kadthala Ramaya Narendrnath, Daniel L. Martin, Robert T. Hirahara, Gangadhar Sheelavant |
2013-06-18 |
$9,611,000 |
| 8225927 |
Method to substantially enhance shelf life of hygroscopic components and to improve nano-manufacturing process tool availablity |
Kadthala Ramaya Narendrnath |
2012-07-24 |
$7,359,000 |
| 8043433 |
High efficiency electro-static chucks for semiconductor wafer processing |
— |
2011-10-25 |
$16,484,000 |
| 7732056 |
Corrosion-resistant aluminum component having multi-layer coating |
Laxman Murugesh |
2010-06-08 |
$8,435,000 |
| 7045020 |
Cleaning a component of a process chamber |
Charles S. Kunze |
2006-05-16 |
$29,432,000 |
| 6824748 |
Heated catalytic treatment of an effluent gas from a substrate fabrication process |
Tony Kaushal, Shamouil Shamouilian, Harshad Borgaonkar, Kwok Manus Wong, Michael G. Chafin |
2004-11-30 |
$15,899,000 |
| 6673323 |
Treatment of hazardous gases in effluent |
Tony Kaushal, Kwok Manus Wong, Shamouil Shamouilian |
2004-01-06 |
$45,040,000 |
