| 12172264 |
Carrier head membrane with regions of different roughness |
Ashish Bhatnagar, Kadthala Ramaya Narendrnath |
2024-12-24 |
| 11738421 |
Method of making carrier head membrane with regions of different roughness |
Ashish Bhatnagar, Kadthala Ramaya Narendrnath |
2023-08-29 |
| 11007619 |
Carrier head membrane with regions of different roughness |
Ashish Bhatnagar, Kadthala Ramaya Narendrnath |
2021-05-18 |
| 10160093 |
Carrier head membrane roughness to control polishing rate |
Ashish Bhatnagar, Kadthala Ramaya Narendrnath |
2018-12-25 |
| 9381613 |
Reinforcement ring for carrier head |
Jamie Stuart Leighton, Stacy Meyer |
2016-07-05 |
| 9272387 |
Carrier head with shims |
Stacy Meyer, Christopher R. Mahon |
2016-03-01 |
| 9227297 |
Retaining ring with attachable segments |
Irfanulla Khuddus Rahmathullah, Bopanna Ichettira Vansantha, Padma Gopalakrishnan, Abraham Palaty, Aswathnarayanaiah Ravi +3 more |
2016-01-05 |
| 9168631 |
Two-part retaining ring with interlock features |
Irfanulla Khuddus Rahmathullah, Bopanna Ichettira Vansantha, Padma Gopalakrishnan, Aswathnarayanaiah Ravi, Abraham Palaty +3 more |
2015-10-27 |
| 8662957 |
Leak proof pad for CMP endpoint detection |
Christopher R. Mahon, Ashish Bhatnagar, Kadthala Ramaya Narendrnath |
2014-03-04 |
| 8475231 |
Carrier head membrane |
Ashish Bhatnagar, Kadthala Ramaya Narendrnath |
2013-07-02 |
| 7413986 |
Feedforward and feedback control for conditioning of chemical mechanical polishing pad |
— |
2008-08-19 |
| 7349753 |
Adjusting manufacturing process control parameter using updated process threshold derived from uncontrollable error |
— |
2008-03-25 |
| 7221990 |
Process control by distinguishing a white noise component of a process variance |
— |
2007-05-22 |
| 7101799 |
Feedforward and feedback control for conditioning of chemical mechanical polishing pad |
— |
2006-09-05 |
| 7040956 |
Control of chemical mechanical polishing pad conditioner directional velocity to improve pad life |
— |
2006-05-09 |
| 6910947 |
Control of chemical mechanical polishing pad conditioner directional velocity to improve pad life |
— |
2005-06-28 |
