Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923379 | Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure | Chin-Yi Liu, Daniel Lai, Rajitha Vemuri | 2021-02-16 |
| 9960019 | Life enhancement of ring assembly in semiconductor manufacturing chambers | Sandhya Arun, Prashanth Kodigepalli, Ashish Bhatnagar, Dan Martin, Christopher Heath John Hossack | 2018-05-01 |
| 9481608 | Surface annealing of components for substrate processing chambers | Ashish Bhatnagar, Laxman Murugesh | 2016-11-01 |
| 9227297 | Retaining ring with attachable segments | Irfanulla Khuddus Rahmathullah, Bopanna Ichettira Vansantha, Abraham Palaty, Aswathnarayanaiah Ravi, Ashish Bhatnagar +3 more | 2016-01-05 |
| 9168631 | Two-part retaining ring with interlock features | Irfanulla Khuddus Rahmathullah, Bopanna Ichettira Vansantha, Aswathnarayanaiah Ravi, Abraham Palaty, Young J. Paik +3 more | 2015-10-27 |
| 8740206 | Life enhancement of ring assembly in semiconductor manufacturing chambers | Sandhya Arun, Prashanth Kodigepalli, Ashish Bhatnagar, Dan Martin, Christopher Heath John Hossack | 2014-06-03 |
| 8617672 | Localized surface annealing of components for substrate processing chambers | Ashish Bhatnagar, Laxman Murugesh | 2013-12-31 |