Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923379 | Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure | Daniel Lai, Rajitha Vemuri, Padma Gopalakrishnan | 2021-02-16 |
| 10109460 | Universal non-invasive chamber impedance measurement system and associated methods | David Schaefer, Dan Marohl | 2018-10-23 |
| 9790582 | Long lifetime thermal spray coating for etching or deposition chamber application | Russell Ormond, Nash W. ANDERSON, David Schaefer | 2017-10-17 |